Epitaxial lift off stack having a pre-curved handle and methods thereof

ABSTRACT

Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a sacrificial layer on a substrate, adhering a flattened, pre-curved support handle onto the epitaxial material, and removing the sacrificial layer during an etching process. The etching process includes bending the pre-curved support handle to have substantial curvature while peeling the epitaxial material from the substrate and forming an etch crevice therebetween. Compression is maintained within the epitaxial material during the etching process. The flattened, pre-curved support handle may be formed by flattening a pre-curved support material.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of the U.S. patentapplication Ser. No. 12/475,406 by MELISSA ARCHER, HARRY ATWATER, THOMASGMITTER, GANG HE, ANDREAS HEGEDUS, GREGG HIGASHI, STEWART SONNENFELDT,filed on May 29, 2009, entitled “EPITAXIAL LIFT OFF STACK HAVING APRE-CURVED HANDLE AND METHODS THEREOF,” which claims benefit of U.S.Ser. No. 61/057,784, filed May 30, 2008, and U.S. Ser. No. 61/104,286,filed Oct. 10, 2008, which is hereby incorporated by reference in itsentirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

Embodiments of the invention generally relate to the fabrication ofsolar, semiconductor, and electronic devices, and more particularly toepitaxial lift off (ELO) devices and methods.

2. Description of the Related Art

One phase in device fabrication involves handling and packaging of thinfilms used as solar devices, semiconductor devices, or other electronicdevices. Such thin film devices may be manufactured by utilizing avariety of processes for depositing and removing materials onto a waferor other substrate. One uncommon technique for manufacturing thin filmdevices is known as the epitaxial lift off (ELO) process. The ELOprocess includes depositing an epitaxial layer or film on a sacrificiallayer on a growth substrate, then etching the sacrificial layer toseparate the epitaxial layer from the growth substrate. The thinepitaxial layer removed is known as the ELO film or layer and typicallyincludes thin films used as solar devices, semiconductor devices, orother electronic devices.

The thin ELO films are very difficult to manage or handle, such as whenbonding to a substrate or while packaging, since the ELO films are veryfragile and have narrow dimensions. The ELO films crack under very smallforces. Also, the ELO films are very difficult to align due to theirextremely narrow dimensions.

The sacrificial layer is typically very thin and is usually etched awayvia a wet chemical process. The speed of the overall process may belimited by the lack of delivery or exposure of reactant to the etchfront, which leads to less removal of by products from the etch front.This described process is a diffusion limited process and if the filmswere maintained in their as deposited geometries, a very narrow and longopening would form to severely limit the overall speed of the process.To lessen the transport constraint of the diffusion processes, it may bebeneficial to open up the resulting gap created by the etched or removedsacrificial layer and bending the epitaxial layer away from the growthsubstrate. A crevice is formed between the epitaxial layer and thegrowth substrate—which geometry provides greater transport of speciesboth towards and away the etch front. Reactants move towards the etchfront while by-products generally move away from the etch front.

The bending of the epitaxial layer however can induce stresses therewithin and the amount of bending is limited by the strength of the film.The epitaxial layer usually contains a brittle material, which does notundergo plastic deformation before failure, and as such may be subjectto crack induced failures.

To minimize the potential for crack propagation, the brittle epitaxiallayer may be maintained under a compressive stress. Cracks usually donot propagate through regions of residual compressive stress. Theepitaxial layer is placed under tensile stress while bending theepitaxial layer away from the growth substrate since the epitaxial layeris on the outside of the curvature of the crevice. The tensile stresslimits the amount of crevice curvature and reduces the speed of the etchprocess. To overcome this limitation, a residual compressive stress maybe instilled within the epitaxial layer before etching the sacrificiallayer. This initial compressive stress may be offset by tensile stresscaused by the bending and therefore allows for a greater amount bendingduring the separation process.

Therefore, there is a need for more robust ELO thin films, as well asfor methods to form, remove, and handle ELO thin films.

SUMMARY OF THE INVENTION

Embodiments of the invention generally relate to epitaxial lift off(ELO) thin films and devices and methods used to form such films anddevices. The ELO thin films generally contain epitaxially grown layerswhich are formed on a sacrificial layer disposed on or over a substrate,such as a wafer. A support material or support handle may be disposed onthe opposite side of the epitaxial material than the substrate. Thesupport handle may be used to stabilize the epitaxial material, such asby providing compression to the epitaxial material. Furthermore, thesupport handle may be used to grip and hold the epitaxial materialduring the etching and removal steps of the ELO process. In variousembodiments, the support material or support handle may include apre-curved handle, a multi-layered handle, a non-uniform wax handle, andtwo shrinkage-induced handles which universally or unidirectional shrinkto provide compression to the epitaxial material.

In one embodiment, a method for forming a thin film material during anELO process is provided which includes forming an epitaxial material onor over a sacrificial layer, which is disposed on or over on asubstrate, adhering a multi-layered support handle onto the epitaxialmaterial, removing the sacrificial layer during an etching process, andpeeling the epitaxial material from the substrate while forming an etchcrevice therebetween while maintaining compression in the epitaxialmaterial during the etching process. The method further provides thatthe multi-layered support handle contains a stiff support layer disposedon or over or adhered to the epitaxial material, a soft support layeradhered to the stiff support layer, and a handle plate adhered to thesoft support layer.

In one example, the multi-layered support handle contains a stiffsupport layer disposed over the epitaxial material, a soft support layerdisposed over the stiff support layer, and a handle plate disposed overthe soft support layer. The multi-layered support handle is disposed onand maintains compression of the epitaxial material. In someembodiments, the stiff support layer may contain a polymer, a copolymer,an oligomer, derivatives thereof, or combinations thereof. In oneexample, the stiff support layer contains a copolymer, such as anethylene/vinylacetate (EVA) copolymer or a derivative thereof. In otherexamples, the stiff support layer may contain a hot-melt adhesive, anorganic material or organic coating, an inorganic material, orcombinations thereof. In one example, the inorganic material containsmultiple inorganic layers, such as metal layers and/or dielectriclayers. In another example, the stiff support layer may containcomposite materials or patterned composite materials, such asorganic/inorganic materials. The composite materials may contain atleast one organic material and at least one inorganic material. In someexamples, the inorganic material may contain a metal layer, a dielectriclayer, or combinations thereof. In another example, the stiff supportlayer may contain wax or derivatives thereof, such as black wax.

In other embodiments, the soft support layer may contain an elastomer,such as rubber, foam, or derivatives thereof. Alternatively, the softsupport layer may contain a material such as neoprene, latex, orderivatives thereof. The soft support layer may contain a monomer. Forexample, the soft support layer may contain an ethylene propylene dienemonomer or derivatives thereof. In another embodiment, the soft supportlayer may contain a liquid or a fluid contained within a membrane.Alternatively, the soft support layer may contain a gas contained withina membrane. The membrane may contain a material such as rubber, foam,neoprene, latex, or derivatives thereof. In one example, the membrane isa balloon, such as a rubber balloon or a latex balloon.

In another embodiment, the handle plate may be made from or contain aplastic material, a polymeric material, or an oligomeric material,derivatives thereof, mixtures thereof, or combinations thereof. In oneexample, the handle plate may contain polyester or derivatives thereof.The handle plate may have a thickness within a range from about 50.8 μmto about 127.0 μm, such as about 23.4 μm.

In one embodiment, the method further includes removing the epitaxialmaterial from the substrate and attaching a support substrate to anexposed surface of the epitaxial material. The support substrate may bebonded to the exposed surface of the epitaxial material by an adhesive,thereby forming an adhesive layer therebetween. In one example, theadhesive is an optical adhesive and/or may be UV-curable (e.g., cured byultraviolet light exposure). In some examples, the adhesive may containa mercapto ester compound. In other examples, the adhesive may furthercontain a material such as butyl octyl phthalate, tetrahydrofurfurylmethacrylate, acrylate monomer, derivatives thereof, or combinationsthereof.

In another embodiment, a thin film material, such as an ELO thin filmstack, is provided which includes a support substrate disposed on orover a first surface of the epitaxial material, and a support handledisposed on or over the other surface of the epitaxial material. Anadhesive layer may be disposed between the epitaxial material and thesupport substrate. In one example, the support handle may be amulti-layered support handle which contains the stiff support layerdisposed on or over the epitaxial material, the soft support layerdisposed on or over the stiff support layer, and the handle platedisposed on or over the soft support layer.

In another embodiment, the ELO thin film stack is provided whichincludes a sacrificial layer disposed on a substrate, an epitaxialmaterial disposed on or over the sacrificial layer, and a flattened,pre-curved support material or handle disposed on or over the epitaxialmaterial. The flattened, pre-curved support handle is under tensionwhile the epitaxial material is under compression. The flattened,pre-curved support handle may contain a single layer or multiple layers.The flattened, pre-curved support handle may contain wax, polyethylene,polyester, polyolefin, polyethylene terephthalate polyester, rubber,derivatives thereof, or combinations thereof. In some examples, theflattened, pre-curved support handle contains wax. In other examples,the flattened, pre-curved support handle contains polyethyleneterephthalate polyester or derivatives thereof. In other examples, theflattened, pre-curved support handle contains polyolefin or derivativesthereof.

In some embodiments, the flattened, pre-curved support handle contains afirst layer having wax and a second layer having a polymer disposed overthe first layer. For example, the second layer may contain polyethyleneterephthalate polyester or derivatives thereof. In other examples, theflattened, pre-curved support handle contains at least three layers. Thethird layer may contain wax and be disposed on or over the second layer.In some examples, the third layer contains another polymer (e.g.,polyethylene or derivatives thereof) and is disposed on or over thesecond layer. In other embodiments, an adhesive is disposed between theflattened, pre-curved support handle and the epitaxial material.

In other embodiments, a method for forming a thin film material, such asan ELO thin film stack, during an ELO process, is provided whichincludes forming an epitaxial material on or over a sacrificial layer ona substrate, adhering a flattened, pre-curved support material or handleonto or over the epitaxial material, removing the sacrificial layerduring an etching process, and peeling the epitaxial material from thesubstrate while forming an etch crevice therebetween and bending theflattened, pre-curved support handle to have substantial curvature. Theflattened support handle is under tension to put the epitaxial materialunder compression. The flattened support handle may be formed byflattening a curved support material.

In another embodiment, the ELO thin film stack is provided whichincludes a sacrificial layer disposed on or over a substrate, anepitaxial material disposed on or over the sacrificial layer, and auniversal shrinkable support handle disposed on or over the epitaxialmaterial, wherein the support handle contains a universal shrinkablematerial, which upon being shrunk, forms tension in the support handleand compression in the epitaxial material. In one example, the universalshrinkable material contains an amorphous material. The amorphousmaterial may be crystallized to undergo a net volume reduction during auniversal shrinking process. The universal shrinkable material maycontain a plastic, a polymer, an oligomer, derivatives thereof, mixturesthereof, or combinations thereof. In some examples, the universalshrinkable support handle contains a heat shrink polymer.

In another embodiment, a method for forming the ELO thin film stackduring an ELO process, is provided which includes forming an epitaxialmaterial on or over a sacrificial layer, which is disposed on or over asubstrate, adhering a universal shrinkable support handle onto or overthe epitaxial material, wherein the support handle contains a universalshrinkable material, shrinking the support handle to form tension in thesupport handle and compression in the epitaxial material during auniversal shrinking process, removing the sacrificial layer during anetching process, and peeling the epitaxial material from the substratewhile forming an etch crevice therebetween and bending the supporthandle to have substantial curvature. The universal shrinkage supporthandle may contain one layer or multiple layers.

In another embodiment, a thin film stack material is provided whichincludes a sacrificial layer disposed on or over a substrate, anepitaxial material disposed on or over the sacrificial layer, and aunidirectional shrinkable support handle disposed on or over theepitaxial material. The unidirectional shrinkable support handle maycontain a shrinkable material and reinforcement fibers extendingunidirectional throughout the shrinkable material. The shrinkablematerial shrinks unidirectional and tangential to the reinforcementfibers to form tension in the support handle and compression in theepitaxial material.

The reinforcement fibers are high-strength polymeric fibers. In oneexample, the reinforcement fibers contain polyethylene or derivativesthereof. In some examples, the reinforcement fibers contain a negativelinear thermal expansion coefficient along the length of the fiber.Generally, the reinforcement fibers have a tensile moduli within a rangefrom about 15 GPa to about 134 GPa.

In other embodiments, a method for forming a thin film material duringan ELO process is provided which includes forming an epitaxial materialon or over a sacrificial layer on a substrate, adhering a unidirectionalshrinkable support handle onto the epitaxial material, wherein thesupport handle contains a shrinkable material and reinforcement fibersextending unidirectional throughout the shrinkable material, andshrinking the support handle tangential to the reinforcement fibers toform tension in the support handle and compression in the epitaxialmaterial during a unidirectional shrinking process. The method furtherincludes removing the sacrificial layer during an etching process,peeling the epitaxial material from the substrate while forming an etchcrevice therebetween, and bending the support handle to have substantialcurvature.

In other embodiments, a thin film stack material is provided whichincludes a sacrificial layer disposed on or over a substrate, anepitaxial material disposed on or over the sacrificial layer, and anon-uniform support handle disposed on or over the epitaxial material,wherein the non-uniform support handle contains a wax film having avarying thickness.

In another embodiment, a method for forming a thin film material duringan ELO process, is provided which includes forming an epitaxial materialdisposed on or over a sacrificial layer on a substrate, and adhering anon-uniform support handle onto or over the epitaxial material, whereinthe non-uniform support handle contains a wax film having a varyingthickness. The method further includes removing the sacrificial layerduring an etching process, peeling the epitaxial material from thesubstrate while forming an etch crevice therebetween, and bending thenon-uniform support handle to form compression in the epitaxial materialduring the etching process.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the inventioncan be understood in detail, a more particular description of theinvention, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this invention and are therefore not to beconsidered limiting of its scope, for the invention may admit to otherequally effective embodiments.

FIG. 1 depicts an ELO thin film stack on a wafer according toembodiments described herein;

FIG. 2A depicts a pre-curved support handle according to an embodimentdescribed herein;

FIGS. 2B-2C depict an ELO thin film stack containing the pre-curvedsupport handle according to embodiments described herein;

FIG. 2D depicts the pre-curved support handle and an epitaxial materialafter being removed from the wafer, as described in embodiments herein;

FIGS. 3A-3C depict an ELO thin film stack containing a universalshrinkable support handle according to another embodiment describedherein;

FIG. 3D depicts the universal shrinkable support handle and theepitaxial material after being removed from the wafer, as described inembodiments herein;

FIGS. 4A-4C depict an ELO thin film stack containing a unidirectionalshrinkable support handle according to other embodiments describedherein;

FIG. 4D depicts the unidirectional shrinkable handle and the epitaxialmaterial after being removed from the wafer, as described in embodimentsherein;

FIGS. 5A-5B depict non-uniform wax support handles disposed on or over athin film stack according to other embodiments described herein;

FIG. 6A depict a multi-layered support handle disposed over a thin filmstack on a substrate according to another embodiment described herein;and

FIG. 6B depict the multi-layered support handle and the thin film stackdisposed on a support substrate according to another embodimentdescribed herein.

DETAILED DESCRIPTION

FIG. 1 depicts substrate 100 containing ELO thin film stack 150 disposedon wafer 102, as described in one embodiment herein. ELO thin film stack150 may have sacrificial layer 104 disposed on or over wafer 102,epitaxial material 106 disposed on or over sacrificial layer 104, andsupport handle 108 disposed on or over epitaxial material 106. Invarious embodiments, support handle 108 is under tension while theepitaxial material 106 is under compression. The ELO process includesremoving sacrificial layer 104 during an etching process, while peelingepitaxial material 106 from wafer 102 and forming an etch crevicetherebetween until epitaxial material 106 and support handle 108 areremoved from wafer 102. Sacrificial layer 104 generally containsaluminum arsenide.

Wafer 102 may contain or be formed of a variety of materials, such asGroup II/V materials, and may be doped with other elements. In oneembodiment, wafer 106 contains gallium arsenide or a derivative thereof.A gallium arsenide wafer has thermal expansion coefficient of about5.73×10⁻⁶° C.⁻¹. In various embodiments, support handle 108 containsmaterials (e.g., wax or polymers) which have a higher coefficient ofthermal expansion.

Support handle 108 may be a single layer of material or multiple layers.In the various embodiments, support handle 108 may be a flattened,pre-curved support handle that is formed by flattening a curved supportmaterial. In another embodiment, support handle 108 may contain ashrinkable material, such as a thermally shrinkable plastic. In analternative embodiment, support handle 108 may contain a shrinkablematerial having reinforcement fibers extending unidirectional throughoutthe shrinkable material. In another embodiment, support handle 108 maycontain a wax film having a varying or non-uniform thickness acrosssubstrate 100. In another embodiment, support handle 108 may be amulti-layered handle.

Pre-Curved Handle

FIGS. 2A-2D depict a pre-curved support material or handle duringvarious aspects of an ELO process or within an ELO thin film stack, asdescribed in one embodiment herein. FIG. 2A illustrates a pre-curvedsupport material, such as pre-curved support handle 202. Pre-curvedsupport handle 202 contains top surface 211 and bottom surface 213. Inone embodiment, pre-curved support handle 202 may be flattened orstraightened prior to adhering or attaching to the substrate 200, suchas to epitaxial material 204. Alternatively, pre-curved support handle202 may be flattened or straightened while adhering or attaching to thesubstrate 200. Once flattened or straightened, pre-curved support handle202 is under tension, which is utilized to produce compression to theunderlying layers (e.g., epitaxial material 204) when adhered orattached to the substrate 200.

FIG. 2B depicts substrate 200 containing ELO thin film stack 250disposed on or over wafer 208, as described in one embodiment herein.ELO thin film stack 250 may have sacrificial layer 206 disposed on orover wafer 208, epitaxial material 204 disposed on or over sacrificiallayer 206, and pre-curved support handle 202 disposed on or overepitaxial material 204. During the etching process, flattened pre-curvedsupport handle 202 bends towards top surface 211, as depicted in FIG.2C. Pre-curved support handle 202 may have a radius of curvature withina range from about 10 cm to about 100 cm.

In some embodiments, pre-curved support handle 202 contains multiplelayers, such as a first layer of wax and a second layer of a polymerdisposed on or over the first layer. For example, the second layer maycontain polyethylene terephthalate polyester, such as a MYLAR® polymericfilm. In other examples, pre-curved support handle 202 contains at leastthree layers. The third layer may be disposed on or over the secondlayer. In some examples, the third layer contains another polymer (e.g.,polyethylene or derivatives thereof) or wax, which is disposed on orover the second layer.

FIG. 2B depicts substrate 200 containing pre-curved support handle 202after being flattened. The flattened, pre-curved support handle 202 maybe disposed on or over epitaxial material 204, which may be disposed onor over sacrificial layer 206. Sacrificial layer 206 may be disposed onor over wafer 208.

In some embodiments, an adhesive (not shown) may be disposed betweenpre-curved support handle 202 and epitaxial material 204. The adhesivemay be a pressure sensitive adhesive, a hot melt adhesive, anultraviolet (UV) curing adhesive, a natural adhesive, a syntheticadhesive, derivatives thereof, or combinations thereof.

In some embodiments, sacrificial layer 206 may contain aluminumarsenide, alloys thereof, derivatives thereof, or combinations thereof.In one example, sacrificial layer 206 contains an aluminum arsenidelayer. Sacrificial layer 206 may have a thickness of about 20 nm orless, preferably, within a range from about 1 nm to about 10 nm, andmore preferably, from about 4 nm to about 6 nm. Wafer 208 may be a waferor a substrate and usually contains gallium arsenide, gallium arsenidealloys or other derivatives, and may be n-doped or p-doped. In oneexample, wafer 208 contains n-doped gallium arsenide material. Inanother example, wafer 208 contains p-doped gallium arsenide material.

In some embodiments, epitaxial material 204 may contain galliumarsenide, aluminum gallium arsenide, indium gallium phosphide, alloysthereof, derivatives thereof, or combinations thereof. Epitaxialmaterial 204 may contain one layer, but usually contains multiplelayers. In some examples, epitaxial material 204 contains a layer havinggallium arsenide and another layer having aluminum gallium arsenide. Inanother example, epitaxial material 204 contains a gallium arsenidebuffer layer, an aluminum gallium arsenide passivation layer, and agallium arsenide active layer.

The gallium arsenide buffer layer may have a thickness within a rangefrom about 100 nm to about 500 nm, such as about 300 nm, the aluminumgallium arsenide passivation layer may have a thickness within a rangefrom about 10 nm to about 50 nm, such as about 30 nm, and the galliumarsenide active layer may have a thickness within a range from about 500nm to about 2,000 nm, such as about 1,000 nm. In some examples,epitaxial material 204 further contains a second aluminum galliumarsenide passivation layer. The second gallium arsenide buffer layer mayhave a thickness within a range from about 100 nm to about 500 nm, suchas about 300 nm.

In other embodiments herein, epitaxial material 204 may have a cellstructure containing multiple layers. The cell structure may containgallium arsenide, n-doped gallium arsenide, p-doped gallium arsenide,aluminum gallium arsenide, n- doped aluminum gallium arsenide, p-dopedaluminum gallium arsenide, indium gallium phosphide, alloys thereof,derivatives thereof, or combinations thereof.

FIG. 2C depicts the formation of etch crevice 210 while sacrificiallayer 206 is etched away and pre-curved support handle 202 and theepitaxial material are peeled away from wafer 208 during an ELO etchprocess, as described in an embodiment herein. FIG. 2D illustratespre-curved support handle 202 and epitaxial material 204 after beingremoved from wafer 208. The flattened, pre-curved support handle 202 isunder tension while epitaxial material 204 is under compression.

In one embodiment of a method for forming the thin film material,sacrificial layer 206 may be disposed on or over substrate 200, such aswafer 208, epitaxial material 204 disposed on or over sacrificial layer206, and the flattened, pre-curved support material or handle may bedisposed on or over epitaxial material 204. The flattened, pre-curvedsupport material or handle may contain a single layer or multiplelayers. The flattened, pre-curved support material or handle may containwax, polyethylene, polyester, polyolefin, polyethylene terephthalatepolyester, rubber, derivatives thereof, or combinations thereof. In someexamples, the flattened, pre-curved support handle 202 contains wax. Inother examples, the flattened, pre-curved support handle 202 containspolyethylene terephthalate polyester or derivatives thereof, such as aMYLAR® film. In other examples, pre-curved support handle 202 containspolyolefin or derivatives thereof.

In another embodiment, the method for forming the thin film materialduring an ELO process is provided which includes forming epitaxialmaterial 204 over or on sacrificial layer 206 that is disposed onsubstrate 200, such as wafer 208. The method further provides adheringor attaching a flattened pre-curved support material, such as pre-curvedsupport handle 202, over or onto epitaxial material 204, wherein theflattened pre-curved support handle 202 is formed by flattening a curvedsupport material, and the flattened pre-curved support handle 202 isunder tension while epitaxial material 204 is under compression,removing sacrificial layer 206 during an etching process, and peelingepitaxial material 204 from the substrate while forming the etch crevicetherebetween and bending the flattened pre-curved support handle 202 tohave substantial curvature.

In some embodiments, sacrificial layer 206 may be exposed to a wet etchsolution during an ELO etching process. In some examples, the wet etchsolution contains hydrofluoric acid and may contain a surfactant and/ora buffer. Sacrificial layer 206 may be etched at a rate of about 0.3mm/hr or greater, preferably, about 1 mm/hr or greater, and morepreferably, about 5 mm/hr or greater.

In an alternative embodiment, sacrificial layer 206 may be exposed to anelectrochemical etch during the ELO etching process. The electrochemicaletch may be a biased process or a galvanic process. Also, sacrificiallayer 206 may be exposed to a vapor phase etch during the ELO etchingprocess in another embodiment described herein. The vapor phase etchincludes exposing sacrificial layer 206 to hydrogen fluoride vapor. TheELO etching process may be a photochemical etch, a thermally enhancedetch, a plasma enhanced etch, a stress enhanced etch, derivativesthereof, or combinations thereof.

Induced-Shrinkage Handle (Universal Shrinkage)

FIGS. 3A-3D depict a universal shrinkable support material or handleduring various aspects of an ELO process or within an ELO thin filmstack, as described in some embodiments herein. FIG. 3A illustratessubstrate 300 containing ELO thin film stack 350 disposed on or overwafer 308, as described in one embodiment herein. ELO thin film stack350 may include sacrificial layer 306 disposed on or over wafer 308,epitaxial material 304 disposed on or over sacrificial layer 306, anduniversal shrinkable support handle 302 disposed on or over epitaxialmaterial 304. FIG. 3B depicts force/stress 320 as applied to universalshrinkable support handle 302 provides universal shrinkage 322 acrossthe plain of substrate 300.

Shrinkable support handle 302 contains a universal shrinkable material,such as wax, polyethylene, polyester, polyolefin, polyethyleneterephthalate polyester, rubber, derivatives thereof, or combinationsthereof. In one example, shrinkable support handle 302 contains wax. Insome examples, shrinkable support handle 302 contains polyethyleneterephthalate polyester or derivatives thereof, such as a MYLAR® film.In other examples, shrinkable support handle 302 contains polyolefin orderivatives thereof. In other examples, shrinkable support handle 302contains a first layer having wax and a second layer having a polymer(e.g., polyethylene terephthalate polyester) disposed over the firstlayer.

Universal shrinkable support handle 302 may contain three layers or morelayers. For example, shrinkable support handle 302 further may have athird layer containing wax or a polymer and disposed over the secondlayer. The third layer may contain polyethylene or derivatives thereof.

Shrinkable support handle 302 contains a bottom surface and a topsurface and the bottom surface is adhered to or above epitaxial material304. Shrinkable support handle 302 bends towards the top surface duringthe etching process. In another embodiment, the universal shrinkablematerial contains an amorphous material and the amorphous material maybe crystallized to undergo a net volume reduction during the shrinkingprocess. The universal shrinkable material may contain at least oneplastic, rubber, polymer, oligomer, derivatives thereof, or combinationsthereof. In one specific example, the universal shrinkable materialcontains polyester or derivatives thereof. In other example, a heatshrinkable adhesive tape may be used as universal shrinkable supporthandle 302.

In other embodiments, shrinkable support handle 302 may be heated duringthe shrinking process. Shrinkable support handle 302 may contain a heatshrink plastic or polymer. Alternatively, shrinkable support handle 302may be shrunk by removing solvent from the shrinkable material.Shrinkable support handle 302 may be bent to have a radius of curvaturewithin a range from about 10 cm to about 100 cm.

In some embodiments, an adhesive (not shown) may be disposed betweenuniversal shrinkable support handle 302 and epitaxial material 304. Theadhesive may be a pressure sensitive adhesive, a hot melt adhesive, anultraviolet (UV) curing adhesive, a natural adhesive, a syntheticadhesive, derivatives thereof, or combinations thereof. In someexamples, a heat shrinkable tape containing the adhesive on one side maybe used as shrinkable support handle 302.

In some embodiments, epitaxial material 304 may contain galliumarsenide, aluminum gallium arsenide, indium gallium phosphide, alloysthereof, derivatives thereof, or combinations thereof. Epitaxialmaterial 304 may contain one layer, but usually contains multiplelayers. In some examples, epitaxial material 304 contains a layer havinggallium arsenide and another layer having aluminum gallium arsenide. Inanother example, epitaxial material 304 contains a gallium arsenidebuffer layer, an aluminum gallium arsenide passivation layer, and agallium arsenide active layer.

The gallium arsenide buffer layer may have a thickness within a rangefrom about 100 nm to about 500 nm, such as about 300 nm, the aluminumgallium arsenide passivation layer may have a thickness within a rangefrom about 10 nm to about 50 nm, such as about 30 nm, and the galliumarsenide active layer may have a thickness within a range from about 500nm to about 2,000 nm, such as about 1,000 nm. In some examples,epitaxial material 304 further contains a second aluminum galliumarsenide passivation layer. The second gallium arsenide buffer layer mayhave a thickness within a range from about 100 nm to about 500 nm, suchas about 300 nm.

In other embodiments herein, epitaxial material 304 may have a cellstructure containing multiple layers. The cell structure may containgallium arsenide, n-doped gallium arsenide, p-doped gallium arsenide,aluminum gallium arsenide, n-doped aluminum gallium arsenide, p-dopedaluminum gallium arsenide, indium gallium phosphide, alloys thereof,derivatives thereof, or combinations thereof.

In another embodiment, sacrificial layer 306 may contain aluminumarsenide, alloys thereof, derivatives thereof, or combinations thereof.In one example, sacrificial layer 306 contains an aluminum arsenidelayer. Sacrificial layer 306 may have a thickness of about 20 nm orless, preferably, within a range from about 1 nm to about 10 nm, andmore preferably, from about 4 nm to about 6 nm. Wafer 308 may be a waferor a substrate and usually contains gallium arsenide, gallium arsenidealloys, or other derivatives, and may be n-doped or p-doped. In oneexample, wafer 308 contains n-doped gallium arsenide material. Inanother example, wafer 308 contains p-doped gallium arsenide material.

FIG. 3C depicts the formation of etch crevice 310 while sacrificiallayer 306 is etched away and shrinkable support handle 302 and epitaxialmaterial 304 are peeled away from wafer 308. FIG. 3D illustratesshrinkable support handle 302 and epitaxial material 304 after beingremoved from wafer 308.

In one embodiment of a method for forming a thin film material during anELO process, epitaxial material 304 may be formed or deposited oversacrificial layer 306 disposed on or over substrate 300, such as wafer308, and adhering shrinkable support handle 302 over or onto epitaxialmaterial 304. Shrinkable support handle 302 contains a universalshrinkable material. The method further provides shrinking or reducingthe size of shrinkable support handle 302 to form tension in shrinkablesupport handle 302 and compression in epitaxial material 304 during theshrinking process, removing sacrificial layer 306 during an etchingprocess, and peeling epitaxial material 304 from the substrate whileforming etch crevice 310 therebetween and bending shrinkable supporthandle 302 to have substantial curvature. Shrinkable support handle 302may contain one layer or multiple layers.

In another embodiment, a method for forming a thin film material duringan ELO process is provided which includes positioning substrate 300containing epitaxial material 304 disposed on or over sacrificial layer306, which is disposed on or over wafer 308, and adhering shrinkablesupport handle 302 onto epitaxial material 304. Shrinkable supporthandle 302 contains a universal shrinkable material. The method furtherprovides shrinking or reducing the size of shrinkable support handle 302to form tension in shrinkable support handle 302 and compression inepitaxial material 304 during the shrinking process, and removingsacrificial layer 306 during an etching process. The method furtherprovides that the etching process further contains peeling epitaxialmaterial 304 from the substrate, forming etch crevice 310 betweenepitaxial material 304 from the substrate, and bending shrinkablesupport handle 302 to have substantial curvature.

In other embodiments, a thin film stack material is provided whichincludes sacrificial layer 306 disposed on a substrate, epitaxialmaterial 304 disposed over sacrificial layer 306, and shrinkable supporthandle 302 disposed over epitaxial material 304. Shrinkable supporthandle 302 contains a universal shrinkable material that upon beingshrunk, forms tension in shrinkable support handle 302 and compressionin epitaxial material 304. In one example, the shrinkable materialcontains an amorphous material. The amorphous material may becrystallized to undergo a net volume reduction during the shrinkingprocess. The shrinkable material may contain at least one plastic,polymer, oligomer, derivatives thereof, or combinations thereof. In someexamples, shrinkable support handle 302 contains a heat shrink plasticor polymer.

In some embodiments, sacrificial layer 306 may be exposed to a wet etchsolution during the etching process. The wet etch solution containshydrofluoric acid and may contain a surfactant and/or a buffer. In someexamples, sacrificial layer 306 may be etched at a rate of about 0.3mm/hr or greater, preferably, about 1 mm/hr or greater, and morepreferably, about 5 mm/hr or greater.

In an alternative embodiment, sacrificial layer 306 may be exposed to anelectrochemical etch during the etching process. The electrochemicaletch may be a biased process or a galvanic process. Also, sacrificiallayer 306 may be exposed to a vapor phase etch during the etchingprocess in another embodiment described herein. The vapor phase etchincludes exposing sacrificial layer 306 to hydrogen fluoride vapor. Theetching process may be a photochemical etch, a thermally enhanced etch,a plasma enhanced etch, a stress enhanced etch, derivatives thereof, orcombinations thereof.

Induced-Shrinkage Handle (Unidirectional Shrinkage)

FIGS. 4A-4D depict a unidirectional shrinkable support material orhandle during various aspects of an ELO process or within an ELO thinfilm stack, as described in one embodiment herein. FIG. 4A illustratessubstrate 400 containing ELO thin film stack 450 disposed on or overwafer 408, as described in one embodiment herein. ELO thin film stack450 may have sacrificial layer 406 disposed on or over wafer 408,epitaxial material 404 disposed on or over sacrificial layer 406, andunidirectional shrinkable support handle 402 disposed on or overepitaxial material 404.

Unidirectional shrinkable support handle 402 contains a shrinkablematerial and reinforcement fibers extending unidirectional throughoutthe shrinkable material, which upon being shrunk, shrinks tangential tothe reinforcement fibers to form tension in shrinkable support handle402 and compression in epitaxial material 404. FIG. 4B depictsforce/stress 420 as applied to shrinkable support handle 402 providesunidirectional shrinkage 422 across the plain of substrate 400.

Shrinkable support handle 402 contains a bottom surface and a topsurface and the bottom surface is adhered to or above epitaxial material404. Shrinkable support handle 402 may bend towards the top surfaceduring the etching process. In one example, the unidirectionalshrinkable material contains an amorphous material, which may becrystallized to undergo a net volume reduction during the unidirectionalshrinking process. In another example, the unidirectional shrinkablematerial may contain plastic, polymer, oligomer, derivatives thereof, orcombinations thereof. In one example, the unidirectional shrinkablematerial contains polyester or derivatives thereof.

The reinforcement fibers may be high-strength polymeric fibers. Thereinforcement fibers may contain polyethylene or derivatives thereof. Insome examples, the reinforcement fibers contain a negative linearthermal expansion coefficient along the length of the fiber. Generally,the reinforcement fibers have a tensile moduli within a range from about15 GPa to about 134 GPa.

In some examples, unidirectional shrinkable support handle 402 may beheated during the shrinking process. Shrinkable support handle 402 maycontain a heat shrink polymer and high-strength polymeric fibers. Inother examples, shrinkable support handle 402 is shrunk by containsremoving solvent from the shrinkable material. Shrinkable support handle402 may be bent to have a radius of curvature within a range from about10 cm to about 100 cm.

In some embodiments, an adhesive (not shown) may be disposed betweenunidirectional shrinkable support handle 402 and epitaxial material 404.The adhesive may be a pressure sensitive adhesive, a hot melt adhesive,an ultraviolet (UV) curing adhesive, a natural adhesive, a syntheticadhesive, derivatives thereof, or combinations thereof.

In some embodiments herein, epitaxial material 404 may contain galliumarsenide, aluminum gallium arsenide, indium gallium phosphide, alloysthereof, derivatives thereof, or combinations thereof. Epitaxialmaterial 404 may contain one layer, but usually contains multiplelayers. In some examples, epitaxial material 404 contains a layer havinggallium arsenide and another layer having aluminum gallium arsenide. Inanother example, epitaxial material 404 contains a gallium arsenidebuffer layer, an aluminum gallium arsenide passivation layer, and agallium arsenide active layer.

The gallium arsenide buffer layer may have a thickness within a rangefrom about 100 nm to about 500 nm, such as about 400 nm, the aluminumgallium arsenide passivation layer may have a thickness within a rangefrom about 10 nm to about 50 nm, such as about 30 nm, and the galliumarsenide active layer may have a thickness within a range from about 500nm to about 2,000 nm, such as about 1,000 nm. In some examples,epitaxial material 404 further contains a second aluminum galliumarsenide passivation layer. The second gallium arsenide buffer layer mayhave a thickness within a range from about 100 nm to about 500 nm, suchas about 400 nm.

In other embodiments herein, epitaxial material 404 may have a cellstructure containing multiple layers. The cell structure may containgallium arsenide, n-doped gallium arsenide, p-doped gallium arsenide,aluminum gallium arsenide, n-doped aluminum gallium arsenide, p-dopedaluminum gallium arsenide, indium gallium phosphide, alloys thereof,derivatives thereof, or combinations thereof.

In another embodiment, sacrificial layer 406 may contain aluminumarsenide, alloys thereof, derivatives thereof, or combinations thereof.In one example, sacrificial layer 406 contains an aluminum arsenidelayer. Sacrificial layer 406 may have a thickness of about 20 nm orless, preferably, within a range from about 1 nm to about 10 nm, andmore preferably, from about 4 nm to about 6 nm. Wafer 408 may be a waferor a substrate and usually contains gallium arsenide, gallium arsenidealloys, or other derivatives, and may be n-doped or p-doped. In oneexample, wafer 408 contains n-doped gallium arsenide material. Inanother example, wafer 408 contains p-doped gallium arsenide material.

FIG. 4C depicts the formation of etch crevice 410 while sacrificiallayer 406 is etched away and shrinkable support handle 402 and epitaxialmaterial 404 are peeled away from wafer 408. FIG. 4D illustratesshrinkable support handle 402 and epitaxial material 404 after beingremoved from wafer 408.

In another embodiment, a method for forming a thin film material duringan ELO process is provided which includes forming epitaxial material 404over sacrificial layer 406 on substrate 400, adhering shrinkable supporthandle 402 onto epitaxial material 404, wherein shrinkable supporthandle 402 contains a unidirectional shrinkable material andreinforcement fibers extending unidirectional throughout the shrinkablematerial, and shrinking or reducing shrinkable support handle 402tangential to the reinforcement fibers to form tension in shrinkablesupport handle 402 and compression in epitaxial material 404 during theshrinking process. The method further includes removing sacrificiallayer 406 during an etching process, and peeling epitaxial material 404from the substrate while forming an etch crevice therebetween andbending unidirectional shrinkable support handle 402 to have substantialcurvature.

In one embodiment of a method for forming a thin film material during anELO process is provided which includes depositing epitaxial material 404on or over sacrificial layer 406 that is disposed on wafer 408 ofsubstrate 400, and adhering shrinkable support handle 402 onto epitaxialmaterial 404. Shrinkable support handle 402 contains a unidirectionalshrinkable material and reinforcement fibers extending unidirectionalthroughout the shrinkable material. The method further providesshrinking or reducing shrinkable support handle 402 tangential to thereinforcement fibers to form tension in shrinkable support handle 402and compression in epitaxial material 404 during the shrinking process,and removing sacrificial layer 406 during an etching process. Theetching process contains peeling epitaxial material 404 from thesubstrate, forming an etch crevice between epitaxial material 404 fromthe substrate, and bending unidirectional shrinkable support handle 402to have substantial curvature.

In some embodiments, sacrificial layer 406 may be exposed to a wet etchsolution during the etching process. The wet etch solution containshydrofluoric acid and may contain a surfactant and/or a buffer. In someexamples, sacrificial layer 406 may be etched at a rate of about 0.3mm/hr or greater, preferably, about 1 mm/hr or greater, and morepreferably, about 5 mm/hr or greater.

In an alternative embodiment, sacrificial layer 406 may be exposed to anelectrochemical etch during the etching process. The electrochemicaletch may be a biased process or a galvanic process. Also, sacrificiallayer 406 may be exposed to a vapor phase etch during the etchingprocess in another embodiment described herein. The vapor phase etchincludes exposing sacrificial layer 406 to hydrogen fluoride vapor. Theetching process may be a photochemical etch, a thermally enhanced etch,a plasma enhanced etch, a stress enhanced etch, derivatives thereof, orcombinations thereof.

Non-Uniform Handle

FIGS. 5A-5B depict substrate 500 containing ELO thin film stack 550disposed on or over wafer 508, as described in one embodiment herein.ELO thin film stack 550 may have sacrificial layer 506 disposed on orover wafer 508, epitaxial material 504 disposed on or over sacrificiallayer 506, and non-uniform support handle 502 disposed on or overepitaxial material 504. In one embodiment, non-uniform support handle502 contains a wax film having a varying thickness, as described in someembodiments herein. In one example, the varying thickness of non-uniformsupport handle 502 is thickest in or near middle 510 a of non-uniformsupport handle 502, as depicted in FIG. 5A. In another example, thevarying thickness of non-uniform support handle 502 is thinnest in ornear middle 510 b of non-uniform support handle 502, as depicted in FIG.5B.

In another embodiment, ELO thin film stack 550 contains sacrificiallayer 506 disposed on a substrate, epitaxial material 504 under disposedover sacrificial layer 506, and non-uniform support handle 502 disposedover epitaxial material 504, wherein non-uniform support handle 502contains a wax film having a varying thickness or non-uniform thickness.

In other embodiments, a method for forming a thin film material duringan ELO process, is provided which includes forming epitaxial material504 over sacrificial layer 506 on a substrate, adhering non-uniformsupport handle 502 onto epitaxial material 504, wherein non-uniformsupport handle 502 contains a wax film having a varying thickness,removing sacrificial layer 506 during an etching process, and peelingepitaxial material 504 from the substrate while forming an etch crevicetherebetween and bending non-uniform support handle 502 to formcompression in epitaxial material 504 during the etching process.

In another embodiment, a method for forming a thin film material duringan ELO process, is provided which includes positioning a substratecontaining epitaxial material 504 disposed over sacrificial layer 506 onthe substrate, adhering non-uniform support handle 502 onto epitaxialmaterial 504, wherein non-uniform support handle 502 contains a wax filmhaving a varying thickness, and removing sacrificial layer 506 during anetching process, wherein the etching process further contains peelingepitaxial material 504 from the substrate, forming an etch crevicebetween epitaxial material 504 from the substrate, and bendingnon-uniform support handle 502 to form compression in epitaxial material504 during the etching process.

In some embodiments, non-uniform support handle 502 contains a bottomsurface of the wax film and a top surface of a flexible member, and thebottom surface is adhered to epitaxial material 504. Non-uniform supporthandle 502 may bend towards the top surface. Non-uniform support handle502 may be bent to have a radius of curvature within a range from about10 cm to about 100 cm. The flexible member may contain plastic, polymer,oligomer, derivatives thereof, or combinations thereof, for example,polyester or a polyester derivative. The flexible member may have a filmthickness within a range from about 50.8 μm (about 20 gauge) to about127.0 μm (about 500 gauge), preferably, about 23.4 μm (about 92 gauge).

In other examples, the wax film contains wax which has a softening pointtemperature within a range from about 65° C. to about 95° C.,preferably, from about 80° C. to about 90° C., such as about 85° C. Inone example, the varying thickness of the wax film is thickest in ornear the middle of the wax film (FIG. 5A) or thinnest in or near themiddle of the wax film (FIG. 5B). In various embodiments, the varyingthickness of the wax film may be within a range from about 1 μm to about100 μm. In one embodiment, the wax film has a thinnest section having athickness within a range from about 1 μm to about 25 μm and has athickest section having a thickness within a range from about 25 μm toabout 100 μm.

In some embodiments herein, epitaxial material 504 may contain galliumarsenide, aluminum gallium arsenide, indium gallium phosphide, alloysthereof, derivatives thereof, or combinations thereof. Epitaxialmaterial 504 may contain one layer, but usually contains multiplelayers. In some examples, epitaxial material 504 contains a layer havinggallium arsenide and another layer having aluminum gallium arsenide. Inanother example, epitaxial material 504 contains a gallium arsenidebuffer layer, an aluminum gallium arsenide passivation layer, and agallium arsenide active layer.

The gallium arsenide buffer layer may have a thickness within a rangefrom about 100 nm to about 500 nm, such as about 500 nm, the aluminumgallium arsenide passivation layer may have a thickness within a rangefrom about 10 nm to about 50 nm, such as about 30 nm, and the galliumarsenide active layer may have a thickness within a range from about 500nm to about 2,000 nm, such as about 1,000 nm. In some examples,epitaxial material 504 further contains a second aluminum galliumarsenide passivation layer. The second gallium arsenide buffer layer mayhave a thickness within a range from about 100 nm to about 500 nm, suchas about 500 nm.

In other embodiments herein, epitaxial material 504 may have a cellstructure containing multiple layers. The cell structure may containgallium arsenide, n-doped gallium arsenide, p-doped gallium arsenide,aluminum gallium arsenide, n-doped aluminum gallium arsenide, p-dopedaluminum gallium arsenide, indium gallium phosphide, alloys thereof,derivatives thereof, or combinations thereof.

In another embodiment, sacrificial layer 506 may contain aluminumarsenide, alloys thereof, derivatives thereof, or combinations thereof.In one example, sacrificial layer 506 contains an aluminum arsenidelayer. Sacrificial layer 506 may have a thickness of about 20 nm orless, preferably, within a range from about 1 nm to about 10 nm, andmore preferably, from about 4 nm to about 6 nm. Wafer 508 may be a waferor a substrate and usually contains gallium arsenide, gallium arsenidealloys, or other derivatives, and may be n-doped or p-doped. In oneexample, wafer 508 contains n-doped gallium arsenide material. Inanother example, wafer 508 contains p-doped gallium arsenide material.

In some embodiments, sacrificial layer 506 may be exposed to a wet etchsolution during the etching process. The wet etch solution containshydrofluoric acid and may contain a surfactant and/or a buffer. In someexamples, sacrificial layer 506 may be etched at a rate of about 0.3mm/hr or greater, preferably, about 1 mm/hr or greater, and morepreferably, about 5 mm/hr or greater.

In an alternative embodiment, sacrificial layer 506 may be exposed to anelectrochemical etch during the etching process. The electrochemicaletch may be a biased process or a galvanic process. Also, sacrificiallayer 506 may be exposed to a vapor phase etch during the etchingprocess in another embodiment described herein. The vapor phase etchincludes exposing sacrificial layer 506 to hydrogen fluoride vapor. Theetching process may be a photochemical etch, a thermally enhanced etch,a plasma enhanced etch, a stress enhanced etch, derivatives thereof, orcombinations thereof.

Multi-Layered Support Handle

Embodiments of the invention generally relate to ELO thin film materialsand devices and methods used to form such materials and devices. In oneembodiment, a method for forming a thin film material during an ELOprocess is provided which includes depositing or otherwise forming anepitaxial material over a sacrificial layer on a substrate, adhering asupport handle onto the epitaxial material, removing the sacrificiallayer during an etching process, and peeling the epitaxial material fromthe substrate while forming an etch crevice therebetween whilemaintaining compression in the epitaxial material during the etchingprocess. The method further provides that the support handle contains astiff support layer adhered to the epitaxial material, a soft supportlayer adhered to the stiff support layer, and a handle plate adhered tothe soft support layer.

In one embodiment, as depicted in FIG. 6A, ELO thin film stack 600A isprovided which includes sacrificial layer 620 disposed on or over asubstrate, such as wafer 610, epitaxial material 630 disposed on or oversacrificial layer 620, and multi-layered support handle 670 disposed onor over epitaxial material 630. In one example, multi-layered supporthandle 670 contains stiff support layer 640 disposed over epitaxialmaterial 630, soft support layer 650 disposed over stiff support layer640, and handle plate 660 disposed over soft support layer 650.Multi-layered support handle 670 is disposed on and maintainscompression of epitaxial material 630.

In some examples, stiff support layer 640 may contain a polymer, acopolymer, an oligomer, derivatives thereof, or combinations thereof. Inone embodiment, stiff support layer 640 contains a copolymer. In oneexample, the copolymer may be an ethylene/vinylacetate (EVA) copolymeror derivatives thereof. An EVA copolymer which is useful as stiffsupport layer 640 is WAFER GRIP adhesive film, commercially availablefrom Dynatex International, located in Santa Rosa, Calif. In otherexamples, stiff support layer 640 may contain a hot-melt adhesive, anorganic material or organic coating, an inorganic material, orcombinations thereof.

In one embodiment, stiff support layer 640 contains an inorganicmaterial having multiple inorganic layers, such as metal layers,dielectric layers, or combinations thereof. In another example, stiffsupport layer 640 may contain composite materials or patterned compositematerials, such as organic/inorganic materials. The composite materialsmay contain at least one organic material and at least one inorganicmaterial. In some examples, the inorganic material may contain a metallayer, a dielectric layer, or combinations thereof. A composite materialmay be used to optimize device performance, such as an increase inreflectivity, conductivity, and/or yield. In another embodiment, stiffsupport layer 640 may contain wax or derivatives thereof, such as blackwax.

In another embodiment, soft support layer 650 may contain an elastomer,such as rubber, foam, or derivatives thereof. Alternatively, softsupport layer 650 may contain a material such as neoprene, latex, orderivatives thereof. Soft support layer 650 may contain a monomer. Forexample, soft support layer 650 may contain an ethylene propylene dienemonomer or derivatives thereof.

In another embodiment, soft support layer 650 may contain a liquid or afluid contained within a membrane. Alternatively, soft support layer 650may contain a gas contained within a membrane. The membrane may containa material such as rubber, foam, neoprene, latex, or derivativesthereof. In one example, the membrane is a balloon of rubber or latex.

In another embodiment, handle plate 660 may contain a material such asplastic, polymer, oligomer, derivatives thereof, or combinationsthereof. In one example, handle plate 660 may contain polyester orderivatives thereof. Handle plate 660 may have a thickness within arange from about 50.8 μm to about 127.0 μm, such as about 23.4 μm.

In one embodiment, the method further includes removing sacrificiallayer 620 to separate epitaxial material 630 from the substrate, such aswafer 610, as depicted in FIG. 6A, and subsequently adhering orattaching epitaxial material 630 to support substrate 680 by bondingtherebetween with an adhesive to form adhesive layer 690, as depicted inFIG. 6B. Support substrate 680 may be bonded to an exposed surface ofepitaxial material 630 by the adhesive. In one example, adhesive layer690 may be formed from or contain an optical adhesive and/or aUV-curable, such as commercially available as Norland UV-curable opticaladhesive. In some examples, the adhesive may contain a mercapto estercompound. In other examples, the adhesive may further contain a materialsuch as butyl octyl phthalate, tetrahydrofurfuryl methacrylate, acrylatemonomer, derivatives thereof, or combinations thereof.

In one example, as depicted in FIG. 6B, ELO thin film stack 6008 isprovided which includes support substrate 680 disposed over a firstsurface of epitaxial material 630, and multi-layered support handle 670disposed over the other surface of epitaxial material 630. Adhesivelayer 690 may be disposed between epitaxial material 630 and supportsubstrate 680. Multi-layered support handle 670 contains stiff supportlayer 640 disposed over epitaxial material 630, soft support layer 650disposed over stiff support layer 640, and handle plate 660 disposedover soft support layer 640.

In one example, adhesive layer 690 may be formed from adhesive that hasbeen exposed to UV radiation during a curing process. Generally, theadhesive may be exposed to the UV radiation for a time period within arange from about 1 minute to about 10 minutes, preferably, from about 3minutes to about 7 minutes, such as about 5 minutes. The adhesive may becured at a temperature within a range from about 25° C. to about 75° C.,such as about 50° C.

In other examples, the adhesive of adhesive layer 690 may be a siliconeadhesive or may contain sodium silicate. In these examples, the adhesivemay be cured for a time period within a range from about 10 hours toabout 100 hours, preferably, from about 20 hours to about 60 hours, andmore preferably, from about 30 hours to about 50 hours, for example,about 42 hours. The adhesive may be cured at a temperature within arange from about 25° C. to about 75° C., such as about 50° C. Also theadhesive may be cured at a pressure within a range from about 1 psi(pounds per square inch) to about 50 psi, preferably, from about 3 psito about 25 psi, and more preferably, from about 5 psi to about 15 psi.In one example, the pressure may be about 9 psi.

Sacrificial layer 620 may be exposed to an etching process to removeepitaxial material 630 from the substrate. In some embodiments,sacrificial layer 620 may be exposed to a wet etch solution during theetching process. The wet etch solution contains hydrofluoric acid andmay contain a surfactant and/or a buffer. In some examples, sacrificiallayer 620 may be etched at a rate of about 0.3 mm/hr or greater,preferably, about 1 mm/hr or greater, and more preferably, about 5 mm/hror greater. In an alternative embodiment, sacrificial layer 620 may beexposed to an electrochemical etch during the etching process. Theelectrochemical etch may be a biased process or a galvanic process.Also, sacrificial layer 620 may be exposed to a vapor phase etch duringthe etching process in another embodiment described herein. The vaporphase etch includes exposing sacrificial layer 620 to hydrogen fluoridevapor. The etching process may be a photochemical etch, a thermallyenhanced etch, a plasma enhanced etch, a stress enhanced etch,derivatives thereof, or combinations thereof.

In embodiments herein, epitaxial material 630 may contain galliumarsenide, aluminum gallium arsenide, indium gallium phosphide, alloysthereof, derivatives thereof, or combinations thereof. Epitaxialmaterial 630 may have a rectangular geometry, a square geometry, orother geometries. Epitaxial material 630 may contain one layer, butusually contains multiple layers. In some examples, epitaxial material630 contains a layer having gallium arsenide and another layer havingaluminum gallium arsenide. In another example, epitaxial material 630contains a gallium arsenide buffer layer, an aluminum gallium arsenidepassivation layer, and a gallium arsenide active layer. The galliumarsenide buffer layer may have a thickness within a range from about 100nm to about 500 nm, such as about 300 nm, the aluminum gallium arsenidepassivation layer has a thickness within a range from about 10 nm toabout 50 nm, such as about 30 nm, and the gallium arsenide active layerhas a thickness within a range from about 500 nm to about 2,000 nm, suchas about 1,000 nm. In some examples, epitaxial material 630 furthercontains a second aluminum gallium arsenide passivation layer.

In other embodiments herein, epitaxial material 630 may contain a cellstructure containing multiple layers. The cell structure may containgallium arsenide, n-doped gallium arsenide, p-doped gallium arsenide,aluminum gallium arsenide, n-doped aluminum gallium arsenide, p-dopedaluminum gallium arsenide, indium gallium phosphide, alloys thereof,derivatives thereof, or combinations thereof. In many examples, thegallium arsenide is n-doped or p-doped.

In some embodiments, sacrificial layer 620 may contain aluminumarsenide, alloys thereof, derivatives thereof, or combinations thereof.In one example, sacrificial layer 620 contains an aluminum arsenidelayer and has a thickness of about 20 nm or less, preferably, within arange from about 1 nm to about 10 nm, and more preferably, from about 4nm to about 6 nm. The substrates, such as wafer 610 and/or supportsubstrate 680, usually contain gallium arsenide or derivatives thereof,and may be n-doped or p-doped.

While the foregoing is directed to embodiments of the invention, otherand further embodiments of the invention may be devised withoutdeparting from the basic scope thereof, and the scope thereof isdetermined by the claims that follow.

1. A method for forming a thin film material for at least one of a solardevice, semiconductor device, and an electronic device during anepitaxial lift off process, comprising: forming an epitaxial materialover a sacrificial layer on a substrate; adhering a flattened,pre-curved support handle onto the epitaxial material, wherein theflattened, pre-curved support handle is formed by flattening a curvedsupport material, and the flattened, pre-curved support handle is undertension while the epitaxial material is under compression; removing thesacrificial layer during an etching process; and peeling the epitaxialmaterial from the substrate while forming an etch crevice therebetweenand bending the flattened, pre-curved support handle to have substantialcurvature.
 2. The method of claim 1, wherein the curved support materialcomprises a material selected from the group consisting of wax,polyethylene, polyester, polyolefin, polyethylene terephthalatepolyester, rubber, derivatives thereof, and combinations thereof.
 3. Themethod of claim 1, wherein the curved support material comprises a firstlayer comprising wax and a second layer comprising a polymer disposedover the first layer.
 4. The method of claim 1, wherein the flattened,pre-curved support handle comprises a bottom surface and a top surface,the bottom surface is adhered to the epitaxial material and theflattened, pre-curved support handle bends towards the top surface. 5.The method of claim 1, wherein an adhesive is used to adhere theflattened, pre-curved support handle onto the epitaxial material, andthe adhesive is selected from the group consisting of pressure sensitiveadhesive, hot melt adhesive, UV curing adhesive, natural adhesive,synthetic adhesive, derivatives thereof, and combinations thereof. 6.The method of claim 1, wherein the sacrificial layer is exposed to a wetetch solution during the etching process, the wet etch solutioncomprises hydrofluoric acid, a surfactant, and a buffer.
 7. The methodof claim 1, wherein the sacrificial layer is exposed to hydrogenfluoride vapor during the etching process.
 8. The method of claim 1,wherein the epitaxial material comprises a material selected from thegroup consisting of gallium arsenide, aluminum gallium arsenide, indiumgallium phosphide, alloys thereof, derivatives thereof, and combinationsthereof.
 9. The method of claim 1, wherein the epitaxial materialcomprises a cell structure containing multiple layers comprising atleast one material selected from the group consisting of galliumarsenide, n-doped gallium arsenide, p-doped gallium arsenide, aluminumgallium arsenide, n-doped aluminum gallium arsenide, p-doped aluminumgallium arsenide, indium gallium phosphide, alloys thereof, derivativesthereof, and combinations thereof.
 10. The method of claim 1, whereinthe sacrificial layer comprises a material selected from the groupconsisting of aluminum arsenide, alloys thereof, derivatives thereof,and combinations thereof.
 11. The method of claim 1, wherein thesubstrate comprises gallium arsenide, n-doped gallium arsenide, p-dopedgallium arsenide, or derivatives thereof.
 12. A method for forming athin film material for at least one of a solar device, a semiconductordevice, and an electronic device during an epitaxial lift off process,comprising: positioning a substrate comprising an epitaxial materialdisposed over a sacrificial layer on the substrate; adhering aflattened, pre-curved support handle onto the epitaxial material,wherein the flattened, pre-curved support handle is formed by flatteninga curved support material, and the flattened, pre-curved support handleis under tension while the epitaxial material is under compression; andremoving the sacrificial layer during an etching process, wherein theetching process further comprises: peeling the epitaxial material fromthe substrate while forming an etch crevice therebetween; and bendingthe flattened, pre-curved support handle to have substantial curvature.